# Tabo na PL, Kumburi, da Alamun Jirgi: Wane Mataki

> Bincike mai zurfi na fasaha kan yadda zafiwar bazara ke haifar da lahani a cikin kariyar tantanin rana kamar tabo na PL da kumburi

![Tabo na PL, Kumburi, da Alamun Jirgi: Wane Mataki](https://cdn.ooitech.com/static/upload/image/20260808/e566f3c774b4a2727579fff5446fffe4.webp)

- ** 2026-08-08
- ** 145 Dubawa
- ** [Blog](./Blog.html)

## Tabo na PL, Kumburi, da Alamun Jirgi: Wane Mataki

**Amsa mai sauri:** Tabo na Photoluminescence, kumburi da alamun jirgi sune siffofi uku daban-daban na lahani, kuma yanayi yana da mahimmanci: daga Yuni zuwa Satumba, sama da 80% na lahanin matakin wafer akan layukan da yawa suna fitowa daga rukunin dalilai iri ɗaya na tsari. Ukun suna kama da juna a cikin hoto mara inganci kuma suna da magunguna daban-daban gaba ɗaya. Tabo na PL yawanci yana nuna alamar gurɓatawa ko sarrafawa maimakon na zafi. Kumburi yana fitowa daga matakin ajiya ko bushewa inda wani Layer ya samu ba daidai ba. Alamun jirgi sune alamar mai ɗauka — matsayin wafer a cikin jirgin ya sake bayyana kansa a cikin tsarin. Kaurin Layer ɗin da ake magana akai suna tsaye a 1 nm, 1.5 nm, 3 nm, 5 nm da 6 nm, wanda ya isa siriri sosai har tasirin saman ya mamaye halin girma. Tsarin bincike yakamata ya bi siffar lahani, ba tsarin tsari ba.

PV Module Manufacturing · na Jerry, Ooitech

## PL Smudges, Blistering, da Boat Marks: Wanne Mataki Ya Kamata A Bincika Da Farko?

Kowace shekara daga Yuni zuwa Satumba, fiye da kashi 80% na masana'antun sel na hasken rana suna fuskantar ciwon kai iri ɗaya. An kiyaye ɗakin aiki a 25℃ akai-akai, girke-girken tsari ba a taɓa su ba, iskar gas tana aiki da kyau, kuma yanayin zafi yana cikin iyakokin da aka ƙayyade. Duk da haka, rayuwar ɗan ƙaramin mai ɗaukar nauyi bayan passivation tana raguwa. Sau da yawa ana ɗaukar canjin yawan samarwa a matsayin tasirin rani marar tabbas. Wannan jagorar ta bayyana tushen matsaloli huɗu masu amfani da za a iya bin diddigin su, tare da ba da shawarar gyare-gyaren tsari masu amfani don lokacin rani.

## Yanayin Matsala da Bayanin Lahani

Ɗauki misali na gaske daga masana'anta a gabashin China a wannan watan Yuni. Wurin aikin ya kasance mai tsayayyen 25℃, amma ma'aunin zafi na ɗakin tsabta ya kai 72%. Idan aka kwatanta da 30% zafi a lokacin hunturu, wannan ya ninka fiye da sau biyu. Injiniyoyin tsari sun lura cewa rayuwar ƙananan masu ɗaukar nauyi bayan passivation ta faɗi gabaɗaya, ta ragu daga 2 ms na yau da kullun zuwa 1.2 ms. Mafi muni, wafers a sama da ƙasa na bututu ɗaya sun nuna bambancin 40% a rayuwar.

Wannan ba lamari ne na keɓantacce ba. Kana iya sarrafa zafin wurin aiki, amma zafi abu ne daban. Ruwan sama na bazara kwatsam zai iya tura zafin ɗakin tsabta daga 50% zuwa 80%. Kowane mataki ɗaya a cikin tsarin passivation yana da matuƙar kula da wannan danshi.

Passivation ba kawai rufe fim ba ne. Ka yi tunaninsa a matsayin roka mai matakai biyu. Mataki na ɗaya shine ajiyar kansa, wanda ya dogara da sinadarin passivation daga Al₂O₃ ko SiNₓ don cika ƙwayoyin da suka ɓace, tare da passivation na tasirin filin don murkushe sake haɗuwa a saman. Mataki na biyu shine passivation na hydrogen. Harba wuta mai zafi yana tilasta hydrogen ya fita daga fim ɗin, yana tura shi cikin saman silicon da lahani na ciki don passivate duk wani ƙwayoyin da suka rage.

Babban abin da ke tantance ingancin ƙarshe na passivation ɗinka shi ne yadda hydrogen ke fitowa yayin firing. Halin hydrogen—daga sigar sa a cikin fim ɗin zuwa kinetics ɗin sa da kuma hanyar yaduwa—yana da alaƙa sosai da zafin jiki da kuma zafi. Wannan shine ainihin dalilin da ya sa lahani na rani ke faruwa saboda canjin zafi, ba canjin zafin jiki ba.

## Layukan Watsa Zafi Guda Huɗu a cikin Passivation

Bari mu raba wannan zuwa layukan watsa guda huɗu. Wurin aikin na iya zama mai sarrafa zafin jiki, amma waɗannan wurare huɗu suna shafar yanayin rani kai tsaye.

### Layi 1: Bambancin Hydrogen Sakamakon Zafin Ruwan Sanyaya

PECVD chambers suna buƙatar sanyaya akai-akai yayin deposition don kiyaye daidaitaccen filin zafin jiki. Chillers yawanci suna da condensers ɗinsu a saman rufin ko waje, suna amfani da ruwan kogi ko rijiya wanda ke ƙarƙashin ikon yanayi gaba ɗaya.

A cikin hunturu, yanayin zafin waje yana kusan 5–10℃, yana kiyaye ruwan sanyaya daidai a 20–22℃. A cikin rani, zafi yana wuce 35℃. Ƙarfin chiller yana raguwa, kuma zafin ruwan sanyaya yana hawa cikin sauƙi zuwa 28–30℃.

Dakin dakin ku mai tsabta na iya kasancewa har yanzu 25℃, amma wannan ruwan sanyaya mai dumi kai tsaye yana canza zafin bangon dakin PECVD. Rarraba hasken zafi yana canzawa. Wafers da ke zaune a wurare daban-daban a cikin bututun suna fuskantar ainihin zafin ajiya daban-daban. Tazarar zafi tsakanin wafers na sama da na kasa tana kara girma, wanda ke bayyana wannan babban bambancin 40% na rayuwa a cikin wannan rukuni guda.

Ko kuna amfani da ALD don Al₂O₃ ko PECVD don SiNₓ, canjin zafin dakin yana nufin yawan fim da abun hydrogen zai canza.

| Zafin Ajiya | Halayen Fim | Halayen Hydrogen |
| --- | --- | --- |
| Dan Kadan Kadan | Mai yawa, babban abun H, musamman N-H/Si-H | Yana bukatar babban zafin harbi don cikakken saki |
| Dan Kadan Babba | Maras nauyi, babban abun H, raunin H bonds | Yana saki da sauri, yana taruwa a kan iyaka |

Samar da masana'antu ya dogara da madaidaicin taga mai matsewa wanda ke daidaita yawan fim da abun ciki na hydrogen. Bambancin kawai ±5℃ zai iya fitar da ku daga wannan taga. Lokacin da ruwan sanyaya na rani ya yi zafi sosai, dukkan yanayin zafin dakin yana canzawa, kuma sigogin fim suna karkata tare da shi.

### Layi 2: AlOₓ Kumburi daga Rashin Daidaiton Tarihin Zafi

Wannan matsalar tana boye a cikin gibin lokaci da yawancin mutane ke rasa. Kayan aikin ALD na yau da kullun yawanci suna gudanar da zagayowar 28–35 don ajiyar Al₂O₃, suna sauka a kauri na 4.5–6 nm. Ajiyar PECVD SiNₓ na gaba yana faruwa tsakanin 400–580℃. Wannan zafin ya riga ya isa ya sa hydrogen da ke cikin Al₂O₃ ya motsa da karfi.

Idan an daidaita yawan dumama na PECVD da lokacin riƙewa, wani ɓangare na hydrogen a cikin Al₂O₃ yana fitowa lafiya yayin wannan lokacin preheating. Sauran ya kasance barga kuma yana fitowa da kyau daga baya a cikin tanderun harbi. Yanayin rani yana lalata wannan salon.

Na farko, canje-canjen tsarin ALD suna faruwa. Layer na 5 nm Al₂O₃ wuri ne mai kyau don farashi da passivation, ma'ana cikakken abun ciki na hydrogen yana da yawa a dabi'a. Babban danshi na rani yana nufin ƙarin hydrogen yana kama a cikin fim.

Na biyu, ajiyar PECVD SiNₓ yana aiki a matsayin matakin farko na annealing don Al₂O₃. Idan dumama yayi sauri sosai ko kuma tsayin zafin jiki ya yi gajere, hydrogen ba ya fitowa sosai.

Na uku, yanayin zafin harbi ya kai 700–900℃. Duk wannan hydrogen da aka kama yana fashewa lokaci guda, yana yaduwa zuwa ga Si/Al₂O₃ interface. Yana samar da kwayoyin gas na H₂ kuma yana gina matsi mai girma a wurin.

A ƙarshe, lokacin da matsin ya wuce ƙarfin mannewar fim ɗin, blistering yana faruwa.

Babban zafi -> Ƙarin H da aka kama -> Rashin kyakkyawan saki na PECVD -> Babban zafin harbi = Blistering.

Ƙarƙashin microscope, za ku ga saman wafer ɗin an rufe shi da ƙananan blisters masu girman 2–10 μm a diamita. Kowane blister yana wakiltar yankin matattu inda passivation ta ɓace.

### Layi na 3: Ƙarar Danshi a Bayan Fage a cikin Tube Furnaces

Wannan shine layin da aka fi manta da shi, duk da haka yana da matuƙar haɗari a samarwa na rani. A lokacin jiran aiki, PECVD tube furnaces suna fuskantar yanayi. Iskar rani tana kaiwa 60–80% RH. Bututun furnace yana sha danshi fiye da yadda yake yi a lokacin hunturu.

Lokacin da kake yin famfo ƙasa da dumama don ajiya, wannan danshin da ya kama yana fitowa ya haɗu da iskar aikin ka. Wannan danshin na baya yana lalata aikin SiNₓ ta hanyoyi uku:

1. Juyawar Ƙididdigar Refractive: SiNₓ yana buƙatar ƙididdigar refractive mai tsauri na 2.05–2.10 don sarrafa ɗaukar haske da passivation. Danshin baya yana canza rabon Si/N. Danshin rani na iya saukar da ƙididdigar ƙasa da 2.05 cikin sauƙi, yana kashe ingancin passivation ɗinka.
2. Canjin Haɗin Hydrogen: H⁺ a cikin tururin ruwa yana gasa da haɗin Si-H da N-H a cikin SiNₓ. Yana lalata yadda hydrogen ke fitowa yayin harba daga baya.
3. Rashin Tsabtaccen Mu'amala: Danshi yana samar da Layer Si-OH mara ƙarfi a saman wafer a farkon ajiya. Wannan yana lalata haɗin tsakanin silicon da Al₂O₃ ko SiNₓ, yana haifar da ƙaruwar yawan tarko a mu'amala nan take.

### Layi 4: Tazarar Q-Time da ke ɓoye Kafin Oxidation na Tunneling

Wannan yana faruwa da wuri a cikin layin, nan da nan bayan polishing alkaline da kuma kafin ajiyar oxide tunneling. Silicon da ba a rufe ba da aka fallasa ga iska yana girma Layer oxide na asali, kuma saurin wannan girma ya dogara gaba ɗaya akan danshi da zafin yanayi.

A 25℃ da 80% RH, silicon marar rufi yana girma 1 nm oxide layer na asali a cikin awa daya kacal. Idan kuskuren kayan aiki ko jinkirin tsari ya bar wadannan wafers a cikin cleanroom na awanni biyu ko uku, wannan layer na asali zai iya kai 1.5 nm ko fiye da haka.

Wannan oxide na asali yana da sako-sako kuma cike da lahani. Lokacin da kake kokarin girma ingantaccen tunnel oxide na 1.2–1.5 nm a samansa, wadannan layukan biyu suna haduwa. Yanzu tunnel layer naka ya kai 2–3 nm—sau biyu na design spec, tare da mummunan ingancin tsari.

Wannan yana haifar da mummunar sarkar dauki. Tunnel layer mai kauri da yawa yana toshe tunneling na electrons. Yayin polysilicon doping, phosphorus yana kokarin wucewa ta wannan kauri mai kauri. Wuraren da tunnel layer ya yi siriri da yawa suna samun over-doped, yana haifar da auger recombination da rage lifetime, wanda ke bayyana a matsayin dark smudges a gwajin PL. Wuraren da ya yi kauri da yawa suna samun under-doped, yana kara contact resistance. Wannan yana haifar da dark edges a kusa da boat marks a gwajin EL. A karshe, open-circuit voltage (Voc) naka yana faduwa sosai a duk batch din.

## Takaitaccen Tushen Dalili: Hudu Wadanda Suka Watsa, Ba Laifi Guda Ba

Matsalolin passivation na bazara ba sababbi ba ne, amma injiniyoyi suna bata lokaci don duba menus da gas flows saboda suna neman wurin gazawa guda daya. Tushen dalili shine danshi yana rushe dukkan sarkar.

Ruwan sanyaya da ke tashi yana canza zafin ɗakin. Babban danshin muhalli yana ƙara yawan hydrogen kuma yana haifar da blistering. Danshin tanderun jiran aiki yana lalata refractive index na SiNₓ. Jinkirin sarrafawa yana barin oxide na asali ya girma ba tare da kulawa ba, yana haifar da smudges na PL da alamomin jirgin ruwa.

## Shawarwari Masu Amfani na Sarrafa Lokacin Rani

Ga yadda ake gyara shi a ƙasa.

Na farko, kula da ruwan sanyaya naka. Bincika zafin shigarwa da kuma bambancin zafin, ba kawai zafin ɗakin ba. Idan ruwan sanyaya ya wuce 24℃, duba chillers naka nan da nan kuma ka daidaita da hannu tare da ƙarfin PECVD ko lokacin ajiya idan ya cancanta. Haɗa dew point na ɗakin tsabta zuwa kula da yau da kullun.

Na biyu, gyara recipes na ALD don lokacin rani. Ɗan ƙara zafin ajiya na ALD kaɗan a cikin taga 180–300℃, ko tsawaita lokacin purge. Wannan yana sa fim ɗin ya zama mai ƙarfi kuma yana rage yawan hydrogen na farko, yana hana blistering daga baya. Har ila yau, tsawaita ƙimar dumama ko lokacin riƙewa yayin ajiyar PECVD SiNₓ don ba da hydrogen ƙarin lokaci don saki cikin sauƙi.

Na uku, gasa tanderun bututu naka akai-akai. Yi gajeren gasa na 500℃ na minti 15 kowane awa 4 yayin jiran aiki don fitar da danshin da aka sha. Idan zai yiwu, kiyaye ɗan ƙaramin matsi mai kyau na N₂ purge yayin jiran aiki.

Na hudu, gina tsarin passivation na bazara na musamman. Kada ka yi hasashe. Ka sami saitin sigogin ALD da PECVD a shirye don musanya lokacin da zafi ya wuce iyaka.

Na biyar, sarrafa lokacin Q ɗinka sosai. Wafers dole su tafi daga polishing alkaline zuwa tanderun oxidation cikin ƙasa da awa ɗaya. Idan akwai jinkiri, adana su a cikin kabinet na nitrogen mai ƙarancin zafi.

## Jerin Bincike na Saurin Passivation na Bazara

| Lamba | Abin Duba | Manufar Sarrafawa | Mai Alhaki |
| --- | --- | --- | --- |
| 1 | Zafin ruwan sanyaya | Binciken yau da kullum, faɗakarwa idan ya wuce iyaka | Kayan aiki/Kayan gini |
| 2 | Dew point na ɗakin tsabta | Tsananin bin iyakokin asali | Kayan gini |
| 3 | Gasashen tanderun bututu | Gajeren gasa kowane awa 4 a jiran aiki | Injiniyan Tsari |
| 4 | Lokacin Q daga Polishing zuwa Ox | Ƙasa da awa 1 | Ƙungiyar Samarwa |
| 5 | Dabarun ALD/PECVD | Canja zuwa tsarin asali na bazara da aka tsara | Ƙungiyar Tsari |

## Ra'ayin Ooitech

Kwanciyar kayan aiki yana da mahimmanci kamar tsarin sarrafawa lokacin da zafi na yanayi ya haifar da matsala a filin samarwa. Masana'antu sau da yawa suna fuskantar raguwar amfanin ƙasa kawai saboda danshin yanayi yana canza tarihin zafi da kuma yanayin hydrogen na layukan kariya. Magance waɗannan ɓoyayyun abubuwa—kamar ingancin injin sanyaya, lokacin Q na yanayi, da kuma fitar da danshi a lokacin jiran aiki—yana haifar da babban bambanci wajen kiyaye daidaiton ingancin ƙwayar rana. Ƙwarewa a cikin waɗannan ƙananan sarrafa muhalli shine abin da ke raba matsakaicin tsarin samar da hasken rana daga ingantaccen layin samarwa mai yawan amfani.

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### Nemi Farashi

Duk abubuwan da aka ɗora suna da tsaro kuma sirri ne.

## Muna isar da gwanintar da za ka iya amincewa sabis ɗinmu

Kayan aiki kai tsaye daga masana'anta.

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### Fa'idodin Rage Kuɗi

Muna ba da ƙima ta musamman, muna haɓaka sakamako yayin da muke rage kasafin kuɗi ga abokan ciniki.

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### Ƙungiyar Ƙwarewarmu

Kwararrun ma'aikatanmu sun ƙware a sababbin hanyoyin magance matsaloli da dabarun da aka keɓance.

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### Fiye da Shekaru 15 na Ƙwarewar Masana'antu

Ƙwarewa mai zurfi tana tabbatar da sakamako masu dogaro, masu bin zamani, da tabbatattu don nasara.

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## Abin da Abokin Cinikinmu Ya ce game da mu

Shaidun abokan ciniki sun yaba da zurfin fahimtarmu game da ƙalubalen su, wanda ke haifar da sababbin hanyoyin magance matsaloli da riba mai ƙarfi. Haɗin gwiwa na dogon lokaci—wasu fiye da shekaru goma—suna nuna amincewarsu da gamsuwa. Labaran nasarar su suna motsa mu don ci gaba da wuce tsammanin su. [Ƙara Sani **](#quote-form)

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Na sake godewa sosai don babban taimako na inganta da gyara masana'anta da kuma koya wa ma'aikata yadda ake amfani da injinan

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### Mark

BIPV Philippines

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Mutum mai babban rai. Na gode sosai da ziyarar ku Mista Wu. Na gode sosai da ayyukan da aka bayar wajen shigar da kayan aiki da horar da dalibai na. Mutum mafi kirki kuma ƙwararre a fanninsa.

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### Jizzakh Polytechnic Institute

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na gode da goyon bayan ƙwararrun ooitech da sabis na bayan lokaci.

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### Diarra Daga Afirka

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Godiya ga Ooitech don samar da kayan aikin gwajin ƙwayar hasken rana na BC da suka dace sosai.

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### KTECH

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Godiya ga Ooitech don samar da kayan aikin samarwa na atomatik cikakke—shigar da ku da sabis na bayan siyarwa sun yi kyau sosai.

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### Amjad

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